2): Dual-frequency laser interferometer
Type: JENAer ZLM800 (all optical parts are made by ZEISS), specification as follows:
• measurement range: 0~40m;
• resolution: 1.25nm;
• precision: 15nm;
• relative precision: 0.22ppm;
• maximum velocity: 3.2m/s;
• wavelength stability: 2 × 10 -9 (1 hour), 2 × 10 -8 (lifetime). |